Valves

Entegris Valves

Entegris offers a complete line of valves for use in fluid handling systems in semiconductor, biopharmaceutical and other high-tech industries. These valves with their robust design offer reliable, leak free operation for both point of use and bulk applications.

Diaphragm

Offers unmatched purity, chemical inertness and high temperature capabilities with connection sizes from 1/4″ to 1 1/4″. The high-temperature version is rated to 180°C fluid. The all PFA valve body and high purity fluoropolymer wetted components provides noncontaminating fluid stream and chemically compatible construction. Available in 2-way pneumatic (normally closed or normally open) or manual (1/4-turn or multi-turn) operations and 3-way flow.

Plug

To be used in the same applications as traditional ball valves. These valves couple corrosion resistance and uninterrupted flow paths which maximize flow with less turbulence. The 1/4-turn manual operation ensures quick turn on/off operation for filter change or sample taking. Standard panel mount configuration makes installation easy.

Check

With O-ring free design, these corrosion-resistant check valves reduce potential contamination in your high-purity chemical applications. 

Poppet design allows for a high flow through rate with a minimum of 1psig cracking pressure to fully open. All wetted parts, including the spring are molded PFA and PTFE for corrosion resistance, ensuring a cleaner overall process.

Needle

Manual, multi-turn adjustments enable precise fluid control. All wetted components are constructed of high purity PFA and PTFE materials for ultrapure and corrosion-resistant performance

Panel mounting configuration is standard and makes for easy installation and maintenance.

Stopcock

Small and compact, these valves allow easy on/off control for any instrumentation needs. The 1/8” orifice valves are available in 2-way, 2-way 90° and 3-way configurations with various port options available to meet your fluid handling system needs.

Solenoid Diaphragm

With all wetted parts of PFA and Kalrez for high purity and corrosion resistance, these ¼” orifice 2-way valves are available in normally closed or normally open or 3 way configurations. Also, a wide range of voltage from 12 and 24 VDC, and 100, 115 and 230 VAC to choose from.

Weir Style

Excels in ultrapure bulk chemical and CMP slurry applications. The weir-style design streamlines the flow path and eliminates dead volume, providing gentle flow while keeping the flow path clean. Single-piece diaphragm eliminates the use of adhesive and will not separate, increasing reliability in vacuum applications. Lock-out option is available for added safety.

Also available in conductive PFA valve body which mitigates ESD by safely dissipating electrical potential (when properly grounded) for applications with flammable solvents and other nonconductive semiconductor chemistries.

Cynergy

For biopharmaceutical industries where routine Clean-in-place (CIP) and Steam-in-place (SIP) applications are required. The diaphragm/weir design provides low process shear, high C_v and complete drainability and cleanability.

Available in 2 way manual or pneumatic operation (normally open or normally closed) with end connections that comply to industry recognized sanitary clamp fitting connection and beadless welding.

All contact surfaces are manufactured from FDA approved materials and comply with USP Class VI and USDA criteria as well as 3-A Sanitary Standards.

Contact us today to find out more about Entegris Valves.